The Fabrication Process And Application For Self-support X-ray Optical Elements

X-ray is an important tool for modern science research, it has been put into use extensively in new energy research and aerospace fields. X-ray optical elements play an import role in the realization of x-ray's core function. As its wavelength is extraordinary short, it's characteristic is different from the visible light and the x-ray optical elements are also exceptional. The transmission-type optical elements in this text have self-support structure, which is tremendous challenge for modern micronano processing technic.Two x-ray optical elements are studied in this text:one is self-support x-ray diffraction grating, whose diffraction performance is good. The other one is x-ray diode flat response filter, which is used in the inertial confinement fusion research successfully.In this thesis, I introduced the application of the two optical elements in CRF and aerospace fields. The parameter is rigorous for transmission grating and XRD flat response filter In x-ray wave band. As a result, It is a tremendous challenge for modern micronano processing technic.In the process of fabrication of the high density self-support x-ray transmission grating, there are several key craft, which include support thin film technology,microelectroplate craft and the grating line revise technology.I studied the fabrication of the high density acylic self-support x-ray transmission grating in detail, especially put emphasis on the acylic self-support background and design. The diffraction efficiency is good at 5nm-25nm wave band.The fabrication of the XRD flat response filter and It's application background were studied detailedly. The experimental result conforms to the theoretical value after consigning filters to cooperative partner.