The Analysis, Designand Manufacture Of A Novel6-DOF Parallel Micro-Manipulator

Along with the progress of human beings and the development of science andtechnology, the human has explored into the microscopic world, the research objects weconfront are more and more micro. Therefore, the demand is more and more for themicro-manipulator which could fulfill subtle operation. The micro-manipulator has wideapplication prospects and significant research value.A novel2-2-2orthogonal6-RSSparallel micro-manipulator is put forward in this paper. We will make analysis, designand manufacture as the main line, and afford mechanism analysis, structure design andworking processes design to the micro-manipulator.The paper has made a introduction to the novel2-2-2orthogonal6-RSS parallelmechanism and performed an characteristics analysis when the mechanism be applied toa micro-manipulator. A novel2-2-2orthogonal6-RSS parallel micro-manipulator isdesigned. After the direct and inverse kinematics been established, the transmission of itskinematics and statics is analyzed. The stiffness models of flexure hinges are established,and the influences of geometric parameters on the stiffness are analyzed based on themodels. Based on several strength requirements, like fatigue strength, several flexurehinges are designed and checked uniting a finite element analysis software, the design ofthe structure is accomplished. It is demonstrated that the micro-manipulator has thecharacteristics of movement decoupling and isotropic properties of the micro-displacements, velocity, acceleration, static force and torque transmission.The theory error of the micro-manipulator is analyzed using the finite elementmethod. Simulation and error analysis about the terminal micro-displacement are finishedby taking into account movement characteristics of the monotonic loading. The resultshows that the micro-manipulator has many advantages such as high positioningprecision, perfect movement decoupling and better isotropic properties.According to the structure characteristics of the micro-manipulator, manufactureingmethod which takes wire EDM as major when milling and fitter as supplementary has been confirmed. Then working processes are worked out. A special fixture is designedfor the processes of wire EDM using for multi-position machining.