| With the rapid development of semiconductor devices and integrated circuit manufacturing process technology, domestic development of semiconductor technology and market demand increase a lot. The probe station is the intermediate test equipment for semiconductor process line. Connected with the test instrument, electrical parameter tests and functional tests for integrated circuits and various transistor cores can be completed automatically. The realization of the probe station allows users to control test equipment through the software interface to control the probe's lifting and moving. Not only the control precision is improved, the control becomes more convenient as well.Regarding the background of practical problems, according to the analysis of projects related to customer needs, this paper will select prober driver in ACS project to make research and extension, designs and develops a prober driver on different semiconductor chips. Different types of probe devices communicate with the driver separately, calling the general function to achieve the function of each module.C language and modular design concepts are used in this system, relatively independent of each functional module and equipment. The function based on the needs of different devices to achieve function is required in this system to save a lot of resources and time, simplifies the system structure greatly, eases of the procedure call, changes and additions. It has good portability and economy, and is able to adapt to different market needs.In this system, what the author takes charge includes the needs analysis, overview design, detailed design, realization, testing of generic function layer, communication layer and device layer of this system. Programming test cases for these three layers on all functional modular is included as well. |
