Research On The Temperature Control In The MOCVD System

This paper describes the design of the MOVCD temperature control system. On the basis of understanding traditional PID control and the studies of time-delay system at home and abroad, we design the part of the MOCVD temperature control. In this paper, several methods are studied, such as variable parameters of the respective Sub-PID, Smith predictor, Self-tuning PID control and Fuzzy Smith+PID. And the thought of temperature control based on single neuron adaptive PID controller and fuzzy immune PID Controller are presented. They can be used to improve the control performance of the system temperature for MOCVD effectively. In view of MOCVD temperature control system, approximate curve diagram of system and corresponding voltage has been gained, and further establish the transfer function model. According to the object and pure inertia lag, we choose a rational temperature control algorithm and carry through system simulation. Then we sum up the rules regulating the relevant parameters. And educe the approximate range of control parameters in the actual system. Finally, we achieve optimal control parameters to come true the temperature control algorithm in practical system. Simulation and actual shows that the combination of different algorithms are superior to the traditional PID control algorithm, more easily meet the requirements of the control system. And it is good for further researched the MOVCD temperature control system.