Research Of Low-power Inductively Coupled Microwave Micro-plasma Based On Planar Spiral

With the development of the integration of microelectronics, microwave and plasma, there is a growing concern on low power microwave microplasma source based on the ’micro-system.Inductively coupled plasma source (ICPS) is characteristic of simple structure, small size, low power consumption, high efficiency, no electrode contamination, long life, and stable operating state, therefore it is widely used in many fields.Based on the theory of planar inductively coupled microwave plasma source, the method of self-resonance to design the planar gradient spiral microstrip antenna at2.45GHz is used, and the end of semicircle type is presented in this thesis. Compared with the linear structure of the end, the semicircle structure has higher quality factor and stronger electromagnetic field in the same condition. And the effects of loss tangent of the dielectric substrate and the thickness of coil metal on the performance of spiral coil are studied.In order to obtain the best performances of the ICPS, some ICPS types with different dielectric substrates are simulated and analyzed. The research shows that the loss angle tangent of ceramic and glass materials is relatively small, Q values are relatively high, the strength of electromagnetic field is quite the same as other dielectric materials. And the planar spiral coil is packaged with glass tube. After packaging, the resonant frequency of the ICPS is lower. However, the strength of electromagnetic field decreases.Then, the excitation of the plasma is simulated using CFD fluid software, and the distributions of electromagnetic field are obtained in Argon at an atmospheric pressure.Finally, verifying the performance of this structure ICPS is through some experiments.