Secondary Electron Emission Of Dynode In Microchannel Plate

MicroChannel Plate (MCP) is a thin plate that consists of a lot of single channel electron multipliers stacked side by side as a two-dimensional electronic multiplier. As silicon micro channel array has the special structure, it can be used in many areas, such as micro channel plate, micro chemical industry instruments, micro biochip and micro analysis system and so on. So the silicon micro channel array has a good prospect of research and application.Based on studies on MCP electron gain and secondary electron emission, this paper designs the structure of Si-MCP dynode, and proposes SiO2(emission layer)/PolySi (conduction layer)/SiO2/Si dynode structures. This study prepares dynode materials with thermal oxidation and LPCVD technology, and gets Si-MCP samples of certain performance. And then it tests parameters of the films of all dynode layers and the Si-MCP electron gain.Finally, after the preparation and test for MCP dynode performance, this paper further studies the features of secondary electrons with experimental simulation. On the basis of mechanism of secondary electron emission, the experiment takes SiO2as the emission layer of dynode, in the hope of making breakthroughs in theory.