Study And Fabrication Of Filter Film Used In The Detectors For Infrared Of Optical System

In order to improve the sensitivity of infrared detector, according to the technical requirements of the filter coating fixed on infrared detector components and using the thin-film material of SI and ybf3, the artical designs the filter coating on the base of film theory that meets the demand of three regions of the spectrum.The artical optimizes the technology parameters including vacuum degree、temperature、evaporation rate and the parameter of ion assisted deposition technique. Through several experiments’ research,the error has been checked and the control accuracy of the film thickness has been improved.The film filter whose transmissivity is91.5%at1064nm、 the average reflectivity between1200nm and2900nm is above97%and the average transmissivity between3000nm and5000nm is95%has been successfully manufactured. Finally we showed the measurement curves and test results.