Experimental Study On Evolution Of Dust Voids In RF Plasma

Experimental study on crystallization of dust and dust particles in the RF plasma sheath layer caused a lot of boom in recent years. For example, the experiment of controlling dust grains in plasma sheath layer provides the way to explore the unknown world in the dimension of space and time which falling to meet before, and the study gives a method of improvement and breakthrough in the traditional probe technology as well as applications in the semiconductor processing industry. Dust plasma using in the plasma etching, spraying and coating technology and so on, have a very important influence in the microelectronics industry production, on the one hand, discharge of the pollution caused by dust particles on the substrate, on the other hand, controlling the formation and the movement of dust particles in the process provides another kind of feasibility for materials synthesis and surface modification of materials.This paper using the method of directly generated dust particles in the process of experiment, the experiment used mixed gases of ethylene and silane gas, argon as carrier gas. Ethylene and silane reacted to generate silicon carbide particles, in the radio-frequency plasma sheath layer the silicon carbide particles formed into the dust clouds and dust voids. The presence of dust particles in the plasma processing will have a great influence on the qualities of nature plasma, therefore to discuss the movement of dust particles in the RF plasma sheath layer and morphology change is of great significance. We discuss and research the experiment through the observation of the change of dust clouds and dust voids in the RF plasma sheath layer:at first, from the dust cloud volume, along with the change of air pressure and RF power,discussing the diameter of dust cloud and dust hole as well as the depth of dust hole along with the change of air pressure and RF power to get the differences under the influence of different physical parameters; and then from records of time concussion phenomenon of dust voids in the plasma sheath layer, got dust oscillation cycle under different air pressure and RF power parameters change curve, and then analyzed the basic properties of the dusty plasma; due to dust particles in the discharge process continuously consume and produce, so the track of a single dust particle is very difficult, after many experiments, we got a single dust particle trajectory over a period of time. By tracking the records of the trajectories of dust particles in the plasma over time, we deduced the stress of the dust particles preliminary. Combined with the movement rules of the dust particles and dust voids, we conclude the properties of dust voids in the dust plasma and the formation reasons.