Method Of Measuring Alignment Error Based On Electronic Speckle Pattern Interferometry

Straightness measurement is a basic project in the field of geometricmeasurement, it is the flatness, parallelism, perpendicularity, concentricity geometricmeasurement basis. At the same time, a very important element of the straightnessmeasurement is also in the machinery manufacturing industry, and dimensionalaccuracy and roundness and roughness as the four elements of product quality. Withthe precision machining and assembly, which requires the precise measurementtechnology corresponding precision mechanical measurement process, straightness isone of the most important measurement object. Thus, to carry out the straightnesserror measurement method has a very important ractical significance.Papers on the basis of electronic the rubato interference technology, focusing onclass electronic rubato interference in straightness measurement error. Based onelectronic speckle pattern interferometry, straightness error measurement method, thismethod combines laser technology, the CCD and image processing technology,non-contact, high precision, the audience, real-time characteristics can be used onlinefast workpiece straightness the error of measurement. The details are described asfollows:Firstly the paper introduced the straightness error measurement methods andelectronic speckle pattern interferometry technology development, application status,and analized feasible from the theory of electronic speckle pattern interferometryapplied to the straightness error measurement.According to the basic nature of the electronic speckle pattern interferometry,measurement principle, characteristics and advantages of electronic speckle patterninterferometry was anylized, and the design of a typical optical path electronicspeckle pattern interferometry was completed.The image of interference fringe was collected by CCD. As for noise factors ofspeckle image, the method was raised in order to remove noise factor, forpreprocessing, binaryzating and outlinedistiling.System devices of straightness error measuring was designed，and optical path of system was analized. Lastly, the experiment was completed for straightness error ofsamples, the feasibility of the system by the experimental results are analyzed anddiscussed, for finding a method to improve system stability.