Research On The Motion Control System Of Precision Motion Platform Driven By Linear Ultrasonic Motor

Precise location technology is one of the symbols of the measure of a national manufacturinggeneral strength, so the research of it has great practical value. It must research its driven and motioncontrol algorithm further to make precise positioning platform to microns or sub-micron positioningaccuracy. This article designs the motion control system in view of the characteristics of the precisionpositioning platform driven by the linear ultrasonic motor, and researches the property of the systemacross experiment. The article mainly completed the following several aspects of the work:(1)According to the piezoelectric effect of piezoelectric ceramic materials, the article analyzes theoperation mechanism of the butterfly linear ultrasonic motor which drives the platform and gets threespeed control modes of ultrasonic motor. In accordance with the compare of them, the system controlsspeed crossing regulating frequency.(2)The article designs the precision positioning table motion control system which consists of2-Dmotion platform, hardware platform and software platform. The hardware platform includes motioncontrol card, drive circuit and photoelectric encoder. The software platform includes data acquisitionand processing algorithm and motion control algorithm.(3)The motion control algorithm can be divided into two kinds: simple closed-loop control andcombination control. In the simple closed-loop control mode, the article gets the factors influencingthe positioning accuracy. Then the system designs the combination control to remove the factors andresearches the system precision in the combination control mode.(4) In view of the structural features of2-D motion platform, the article analyzes the feasibility ofwave tracking. In the combination control mode, the system realizes tracking square wave, sine waveand circular through Dual axle alternating movement.The research sets up the driven control system and proclaims the motion characters of the platform.It researches the precision positioning algorithm and2-D wave tracking. The results of the researchlay a better foundation of the further development of precision positioning technology and broadeningits application field.