| The three degree-of-freedom positioning platform drive by the permanent magnetsynchronous planar motor (PMSPM) susceptible to be affected by the parameterperturbation, load disturbance, uncertainties and the coordination of multi degree-of-freedom motion. In this paper, the second order sliding mode controller for single-directioncontrol of the plane motor positioning platform, a disturbance observer, saturated functionsand coupling equivalent disturbance control strategy have been used. The three degrees offreedom positioning platform drived by permanent magnet synchronous planar motor canachieve the high accuracy, fast and three degrees of freedom positioning control.First of all, on the basis of extensive reading and analysis of domestic and foreignpermanent magnet synchronous planar motor research literature, describe three degrees offreedom permanent magnet synchronous planar motor working principle, to establish andanalyze the mathematical model of the three degree of freedom positioning platform drivedby the permanent magnet synchronous planar motor. According to the characteristics ofplanar motor, analysis of the dynamics model during operation, and derive the relationshipmatrix between the plane motor mover coordinate system and the stator coordinate system.In urgent demand of fast response, high precision flat-driving device for modernlithography, precision measurement, semiconductor manufacturing equipment, precision,ultra-precision machining, it is necessary to design position servo controller to achieveprecision positioning control for PMSPM drive platform.Secondly, adopting second-order sliding mode Control Strategy for the singledirection positioning control, the sliding mode position servo controller base on themodified super twisting algorithm to suppress interference and load changes and achievethe precise control of the single axis. The traditional PID controller for the system wasestablished and simulated. The Simulation results show that using the modified supertwisting algorithm to design sliding mode position controller is able to get better positioning accuracy, and make the system to achieve high-precision positioning and betterrobustness for planar motor single direction control.Finally, using the second-order sliding mode control strategy based on the disturbanceobserver, design a low-pass interference observer, compensation of external disturbance,design a second order sliding mode position controller based on the modified supertwisting algorithm. The disturbance observer and second order sliding mode positioncontroller two complement each other, the saturation function replace of the switchingfunction to undermine the system chattering effectively and Improve the anti-interferenceability and robustness of the system. The simulation for three degrees of freedom and thesingle-degree-of-freedom positioning were taken, The simulation results show that thecontrol strategy and control algorithm make the system achieve better positioningaccuracy, good robustness and stability of the system.The three degrees of freedom positioning platform drive by PMSPM was researchedas the controlled object. The simulation and analysis of the algorithm and control strategywere simulated in Matlab simulation software applications. Compared with the traditionalpositioning control algorithm, three degrees of freedom permanent magnet synchronousplanar motor second sliding mode controller are better able to solve the system ofnonlinear parameter perturbations and uncertainties. This control algorithm can realize thethree degrees of freedom positioning platform for fast and high-precision positioningcontrol, greatly improving the permanent magnet synchronous the plane motor drivenpositioning platform positioning accuracy and robustness of the system. |
