| Based on the research status at home and abroad in optical inspectionplatforms, the dissertation presented three inspection methods which can usedin all kinds of optical products. Then, some detailed design schemes weregiven by the example of two specific optical products, and got two optimalschemes accordingly. Secondly, a series of2~6-dof PKM/HKM were obtainedby the mechanism conceptual design method, and three can used in primarydetection, two can used in intermediate detection and eight can used inadvanced detection. Thirdly, two3-dof plane inspection platform mechanismswere studied detailedly, such as kinematics analysis, workspace analysis anderror model simulation. Fourthly, the computational formulas and methods ofthree mechanisms had been deduced and used for two specific opticalinspection platforms. Again, vector analysis method was applied to establishthe kinematics models of the two6-dof inspection platform mechanisms, twocomplete input-output relationships were determined. Matlab software wereused to check the correctness of input-output relationships. And then,according to the theory of the differential coefficient, the relationshipsbetween the position and orientation of the6-dof mechanism with sliders andits structural error and input error are educed, so the error model is obtained.Finally, create three-dimensional model of the6-dof mechanisms with slidersby using Solidworks software. Stiffness characteristics and modelcharacteristics of this mechanism were analyzed based on Ansys software.This dissertation provided a firm foundation in design, manufacture andcontrol for different levels of optical inspection platforms, especially for6-dofoptical inspection platforms, and also gave us a new way to the PKM/HKM’sapplication. |
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