Design And Experiments Of Micro/nano-indentation Platform At Elevated Temperature

Nanoindentation is one of the techniques to study the micromechanics behav-ior of materials, which is widely used, easy to prepare specimen and operate. And italso has rich testing contents. The traditional indentation tests were carried out inroom temperature, but all the materials and their products usually work under verycomplex conditions, which inevitably influenced by the thermal field, electric field,magnetic field and so on. However, the mechanical properties of materials undermultiphysics can’t be studied by the traditional instruments. Therefore, it is impor-tant to carry out micro/nano-indentation research at elevated temperature, espe-cially for the test of semiconductor material and steel, which is closer to analysismaterial’s actual working conditions using indentation technologies at elevatedtemperature. Elevated temperature micro/nano-indentation enlarges the appliedarea of micro/nano-indentation and provides strong support to analysis the me-chanics of material at micro/nano-scale.This thesis analyzed the research status, classical mechanical model and in-troduced mainstream commercial production of micro/nano-indentation, especiallyintroduced the study of indentation with heating workbench. And also it carried outsome experiments of indentation at coupling field of temperature and stress. Theplatform was designed combining the basic theory and functional requirement ofnano-indentation. The3D model of the platform was built based on that. The finiteelement simulation and the dynamic characteristic analysis were applied to eachunit of the platform. And based on that, a micro/nano indentation platform with thefunctions of precision driving, measuring, computer control and data processingwas developed. A lot of indentation tests were implemented using the new platformto test and verify its stability and repeatability after the sensors were calibrated.According to the direct calibration method of the improved frame flexibility, theplatform was calibrated. A heating workbench was allocated basing on that, which accomplished the test at elevated temperature from room temperature to260de-grees.The hardness and mechanical characteristic of PMMA were measured usingthe calibrated platform. And the measured hardness of PMMA was291MPa,while the measured result by commercial production was245MPa, consequentlythe percentage error was18.8.