Based On Fully Compliant Parallel Mechanism Of Space In The Research Of Ultra Precision Positioning Platform Of Micro

In the past few decades, the precision positioning platform with Nano/Micro-nanometer positioning accuracy have been attracted more and more attention among people.Because of wildly application prospects and development potential,the research of precision positioning platform which based on flexible parallel manipulator or whole compliant parallel manipulator has an important significance.In this paper, based on the theory of compliant mechanism and the precision positioning platform of flexible parallel manipulator, a novel precision positioning platform of whole compliant parallel manipulator is proposed.And then,the static stiffness of flexible parallel manipulator and whole compliant parallel manipulator is deduced and analyzed with principle of virtual work.The paper includes the following contents.1.3-UPC parallel manipulator/4-RPUR parallel manipulator and UPU/4-SPS parallel manipulator are chosen as the prototypes, some corresponding flexible parallel manipulators and whole compliant parallel manipulators are designed through the theory of flexible hinges replaced method and compliant mechanism. On this basis, the corresponding precision positioning platforms are presented.2. Using the principle of virtual work,and Considering the structural characteristics of flexible parallel manipulator and whole compliant parallel manipulator, the model of static stiffness of precision positioning platform is deduced.3. From processing error and theoretical model error, etc,the factor of influencing precision of precision positioning platform is analyzed.4.The modelings and simulations of those flexible parallel manipulators and whole compliant parallel manipulators are established respectively by finite element analysis and softwares of Solidworks and ANSYS.Substituting experimental datas into static stiffness model, then solving static stiffness matrix respectively.5.Contrasting and analysing the static stiffness value of flexible parallel manipulator and whole compliant parallel manipulator.