Point Light Source Array Multiple Wave Free Surface Detection System Design And Research

Optical freeform surface, in comparison with other optical surface, has a bigger free extent. Because of its fiercely changing surface slope, its precise measurement has become a huge problem in recent years. In order to realize the universal test of optical freeform surface, this dissertaion bases on the theory of compensating local wavefronts slope and designs a point-source multi-wavefront interferometer system. This system has great charateristics of its non-null test, large test dynamic range, high spatial resolution, no subaperture mechanic scanning error, high test precision and so on.This dissertaion is on the basis of the method of decreasing test wavefronts slope. It manily focus on optical system of freeform surface non-null test system and technology of wavefronts slope compensation with point-source array. The sytem researched here can accomplish the test of optical freeform surface with60diameter whos normal angel deviate10degree from its best fit sphere. The system mainly includes typical Tyman interferometer system spherical compensating standard lens and wavefronts compensating module based on point source array. The system applies basic Tyman Inteferometer structure. Based on "Black Box" theory, we design spherical compensating standard lens with reverse trace method. To meet the requirement of optical freeform surface testing system, we have researched the designing method of point source array slope compenstaing module and tested the basic aperture of microlens array. At last this dissertaion introduces the installization and debug process of the whole system, and analysises the results. We obtain the interferogram of plane, sphere, asphere and freeform glasses. This dissertaion settles good foundation of future work such as software algorithm design and system error estimate.