Research And Development On The Stereo Vision Measurement System Based On IC Chip

Semiconductor industry has a great requirement to IC chips for size measurement and defects detection, the traditional method to IC chip which reliance on manual visual and online tester for detection can’t meet the speed,accuracy and cost requirements. This paper is based on the research results of3D reconstruction algorithm with gray code structured light method, it developed a stereo vision measuring system based on IC chips.The main work is as follows:First, this paper analyzed the system hardware choice and configuration to the measuring range is form stereo vision measuring hardware system and structure, given the general structure of the visual measuring software system, and illustrated the software function modules and the relationship between each other.Second,this paper introduces the3D measuring space model,the principle of3D camera for reconstruction, the linear and nonlinear camera calibration and stereo calibration method.According to the camera calibration process is easy to generate an error, the paper established a calibration method based on the two cameras relative space coordinate.Thirdly, the main purpose to discussion of this paper is the software design of the stereo vision measuring system which based on IC chip.The control software integrated structure grating projection,real-time image display, camera stereo calibration,3D reconstruction operations, point cloud results visualization,2D detect, the results indicate, save and load the configuration file, three axis control platform of DASA robot and the I/O communications function module, developed a general stereo vision measuring system for IC chips.Finally, in order to improve the accuracy of the system, the paper analyzed all kinds of the system error, and did the tests to the system calibration precision and3D measuring repeat precision, validate the reliability of measurement system.This paper discusses the stereo vision measuring system based on IC chips, accessed to a3D point cloud data and integrated the2D inspection module which meet the industrial requirements, and laid a further standardization and marketization for the system.