Experimental Study On The Fabrication Of One-Dimensional Glass Nanofluidic Device

As the fluid channel further shrinks to nanometer, duo to the dimension of nanometer is approximate to biologic molecule and the Deb ye length, a great deal of phenomena which does not exist in macroscopical world appear such as the partly overlapping of the Electrical double layers in the channel and the increasing of the Viscosity. All of these lead to the fundamental theory study about channel performance and hydrodynamics. It demands more rigorous teelmiques for nanoehip fabrication as the channels downing to nanometer scaleFirst, briefly describes the origin and meaning of nanofluidies and its application value in real life, second introduce the world popular processing technology of nanofluidies chip at present,such as mask processing method and Sacrificial layer technology and so on,Which describes in detail the process of mask processing methods. As a foundation for the experiment. Made under the application methods of nanofluidies chip proposed, which leads to the diode theory, in order to design the nanofluidies diode.The techniques of nanoehannel fabrieation of glass substrate and the chip bonding were developed. Glass nanoehannels were achieved by ultraviolet lithography and wet chemical etching. The depth of the nanochannel was tuned by controlling the etching time. Finally use the SEM and surface profiler to characterize the shape and appearance of the chanel in detail.With the prepared nano-channel then describe the back electrode of nanofluidies chip and the process of setting up the overall chip experiment bench, which involves the use of magnetron sputtering device on the back of copper electrode, and to consider the preparation effect to draw the best process, and finally make a connection with the external chemical workstations.A conclusion about the rearch work is made at the end of essay, describing the experimental effect achieved by nanofluidies chip and the prospects for the directions of future development which play a certain guiding role for the application of nanofluidies technologies.