The Establishment Of System And Experimental Research On Sructure Processing On Microsphere Surface Based On AFM

At the time when transistors, biological chips, sensors and sensor matrixes developtowards miniaturization, the micro/nano machining technology is a revolution of themanufacturing industry. With the improvement of resolution and stability of AtomicForce Microscope (AFM), its application range develops from original surfacetopography measurement to nanoscale processing. Compared with the traditionalprocessing methods, the mechanical scratching method based on AFM of processingmicro/nano structures has the advantages of simplicity of operation and high precision.What’s more, the surface can be traced during the processing. That is to say, thestructures can be measured right after processing. The target capsule (microsphere) isthe container of the ICF thermonuclear reaction fuel as well as the center on which allenergy focuses. The processing and measurement of the target capsule surface are ofgreat importance to the ICF ignition experiments. The researches of the microstructureprocessing on the microsphere surface at present mainly include traditional cuttingmachining and laser processing. However, these methods have their defects inevitably,which cannot meet the accuracy requirements for the micro/nano processing. Thesedefects include the too large scale of the processed structure, the difficulty to meet theaccuracy requirement, the limitation of the microstructures can only be processed atlocal positions such as point positions and line areas while micro-structure of thehemisphere and the entire sphere surface processing cannot be achieved, and theabsence of specialized equipment for commercialization to process structures on themicrosphere surface. Therefore, this paper will develop a new device specialized formicrosphere surface processing, and the mechanical scratching method based on AFMwill be used to machine microstructures on the microsphere surface. The concretecontents are as follows:Firstly, the measurement system for achieving the surface topography of the laserfusion capsule will be used to carry out experiments of processing microstructures onthe surfaces of microspheres. Then the microstructures will be measured and resultsanalyzed in order to verify the feasibility of this approach of processing microstructureson microspheres byAFM.Secondly, for the reason that processing can be only conducted at the highest areaof the sphere using the measurement system, which is relatively small and can’t meet therequirement of the hemisphere and the entire sphere surface processing, a novel devicebased on AFM system which can process microspheres will be established. The effect ofthe static and dynamic characteristics and the temperature of the mechanical system onthe accuracy of the system will be analyzed by Finite Element Analysis (FEA) method.Modal analysis experiments will also be conducted. Finally, this paper will analyze the accuracy of the processing system, study theinfluence of errors, and simulate the processing path. Methods of adjusting theconcentricity error to achieve micro-structure processing on microspheres will bestudied and the corresponding experiments conducted. The most suitable method ofadjusting system concentricity will be obtained by comparing the experimental results.