In the context of the Major Program of NSFC-Basic Studies on Nano-manufacturing, whichentitled,“Research on Formation mechanism of Nano-machining surface microwave corrugationbased on Nonlinear Dynamic Action of aerostatic bearing supported spindle”, two micro-feedingdevices are developed and are used to improve the feeding method of machine tool holder so as toenhance the feed resolution of the tool holder, according to the static and dynamic characteristics ofultra-precision machine tool holder for KDP Crystal which was developed at precision engineeringresearch institute of Harbin Institute of Technology. The thesis mainly makes in-depth research asfollows:A static analysis of ultra-precision machine tool holder for KDP crystal is made with the finiteelement analysis software ANSYS workbench, which provides the basis of designing andmodification of tool holder micro-feeding device. Then through modeling experiment on tool holder,the thesis studies the Influence of vibration-character of tool holder on the formation ofmicro-corrugated workpiece surface.A kind of thread-slope combined micro-feeding device and A kind of elasticmembrane-piezoceramics combined micro-feeding device is designed and is applied to ultra-precision machinetool holder for KDP crystal. Experimental research has been made on their displacement, shockresponse and dynamic characteristics.The above-mentioned results provide a basis for the development and design of Ultra-precisionMachine Tool holder for KDP Crystal, and the feeding resolution of the machine tool holder isenhanced. |