Research On The Microstructure And Textures Of High-purity Copper-Manganese Alloy In Cold Rolling And Annealing Process

With the development of integrated circuits, the metal wiring width is more andmore thin, copper replaces aluminum as the metallization materials has become aninevitable trend. High purity copper alloy target in the application as a new electronicmaterials are more and more in the integrated circuit industry in. High purity Cu-Mnalloy formed since the diffusion barrier layer in the sputtering process, can be used as anew kind of alloy materials in the target manufacturing slowly highlights its advantages,so the research on the deformation, heat treatment process is also indispensable formodern semiconductor industry technology development.In this paper, combined with the optical microscope (OM), microhardness, X raydiffraction (XRD) analysis, system study of microstructure and texture of high purityCu-0.4%Mn alloy unidirectional rolling and cross rolling process of evolution; theevolution of microstructure and texture during annealing of unidirectional rolling andcross rolling of ultra high purity Cu-0.4%Mn in the alloy. Microstructure of alloydeformation and annealing condition of high pure Cu-0.4%Mn and texture uniformityof cross rolling is studied. Research conclusion is as follows:Research conclusion is as follows:①The sample was broken after the coarse grain unidirectional rolling in theoriginal material, tissue showed fibrous structure, and with the increase of deformation,the fibrous tissue between the width becomes narrower and narrower, deformation offibrous tissue and almost parallel to rolling direction. Texture by the approximate cubictexture primitive state, with deformation increase gradually transformed into coppertype texture,{112}<111>, when the deformation increases to86%, into the {110}<112>brass texture typical.③Cross rolling, high pure manganese alloy annealed at differentannealing temperature of60min, with the increase of temperature of recrystallizationgrain gradually increased, to500℃has been basically completed recrystallization,organization mostly equiaxed grains, and some of the more elongated grain.{001}<100>texture increases with annealing temperature gradually decreased.②unidirectional rolling sample recrystallization in450℃, with the increase oftemperature of recrystallization grain gradually increased, to500℃has been basicallycompleted recrystallization, organization mostly equiaxed crystal. At350℃, texturetype for the entire sample for Brass texture change form. The annealing process, with the increase of annealing temperature, the recrystallization texture randomization,appeared the trend, when the temperature is increased up to500℃, recrystallizationbasically completed, is manifested as a weak texture. When the temperature reaches600℃, grain appearance of cube texture, illustrates the features of orientation grewup.One-way rolling samples after different time of annealing at450℃, found that withthe increase of annealing time, the recrystallization grains increased gradually; texturecomponents after recrystallization process from deformation texture to therecrystallization texture types.③Clock rolling, the grain has been destroyed, and with the increase of deformationdegree of deformation of fibrous tissue, compared with unidirectional rolling, crossrolling deformation of fibrous tissue after the width is uniform, when the deformationincreases to80%more uniform microstructure. High deformation condition (63%),cross rolling main texture type is {110}<111>, compared with unidirectional rollingdeformation, in the same conditions, the emergence of the Gauss {110}<001> crossrolling texture, high strength. At the same time, the whole sample in the {123}<412> Rtexture is small, this is the texture of unidirectional rolling no points. When thedeformation increases to80%, still dominated {110}<111> texture texture type, at thesame time, Gauss texture significantly reduced, and the unidirectional rolling texture,then began to brass texture. Cross rolling of high purity copper manganese alloy sheetafter different annealing time after time, with the increase of recrystallized grainsincreased gradually, to120min has been basically completed recrystallization,organization mostly equiaxed grains, and some of the more elongated grain.{001}<100>texture present with the increase of annealing temperature gradually decreased.④Uniformity founds: uniformity in cross rolling along the radial direction indifferent tissues was similar, but slightly different, some tissue near the center of thesurface deformation band width uniform width, have relatively small, there is no surface.In the texture surface of the {132}<643> S {112}<111> copper type texture, texture anda certain amount of, but did not find the brass-type texture. And near the center oftexture is more similar types, for Brass texture {110}<112> and copper type texture, sothe whole sample along the radial direction difference.⑤Cross rolling of the samples after different annealing temperatures withunidirectional and clock rolling also found similar results, but the organization more andmore evenly along the thickness direction. At400℃,350℃brass texture is reducedobviously, this is not Gauss texture, rose to450℃in temperature drop, brass texture texture, Gauss began to appear, but not much, now has a {001}<100> texture. When thetemperature is increased to600℃, Gauss texture and cube texture began to increasegreatly. Rolling of the samples after different annealing time is also found with one-wayand cross rolling similar results, but the organization more and more evenly along thethickness direction. Types of deformation textures of residue400℃, brass texturegreatly reduced, copper type texture as the annealing time increases gradually risingtrend. The whole annealing, Gauss texture with increase of time increases, the final{001}<110> texture types.