Research On Process Optimization&Decision Technology For Precision CMP Function Ceramics

With the extensive application of function ceramics in the fields, such asmicroelectronics, electronics, photoelectron, information technology, etc, the quality andefficiency of function ceramics is faced with greater challenges. CMP, as the main polishingway, plays an active role during the development of the research and application of functionceramics. However, the polishing quality of function ceramics is affected by many factors,such as polishing process, process parameters, etc. At present, the researches on functionceramics in CMP fields mainly concentrate on the influence of the process parameters on thepolishing quality based on single-process way. Thus, for the sake of establishing an effectiveprocess support platform of function ceramics, it is urgent to study the intellectualtechnologies of process and prediction of the polishing quality for CMP function ceramics.Based on the multi-process method and multi-evaluation theory, the following efforts arefocused on the optimization of the polishing process parameters, establishment of theprediction model of the polishing quality, and the process intellectual decision strategy offunction ceramics in CMP, so that the polishing quality and efficiency will be furtherenhanced. The main works in this thesis can be concluded as the following:1) Based on the multi-process theory, a new method has been proposed in this thesis,which can plan the polishing process of function ceramics in CMP. Then, the SiC ceramic hasbeen taken as an example to show the details of the process planning. Finally, the optimizationof the process parameters has been accomplished by applying the orthogonal test and Taguchimethod.2) Based on the step1), the mapping relationship between the multi-process parametersand the evaluating indicators has been established by use of the BP neural network theory,whose accuracy is proved with the example of SiC ceramic.3）On the basis of the above efforts, the process intellectual strategy of function ceramicshas been presented under the multi-process in CMP. And then, according to themultiple-process and multi-evaluation indexes theory, based on the combination of the BPneural network and the case-based reasoning theory, a process intellectual decision supportsystem for CMP function ceramics has been developed with Access and PowerBuildersoftwares, which can realize the intelligent of the process decision, the process parametersoptimization and the polishing quality prediction, etc.In conclusion, the researches in this paper develop the intellectual process technology forCMP function ceramics and provide important significance to the enhancement of the intellectual level of the domestic CMP technology.