Preparation Of WO₃Ceramic Target With High Purity And High Density

WO₃film is a kind of significant function materials. The excellent photoelectricproperties guarantee that it has potential applications in many fields. Many methods canbe used to fabricate WO₃film such as vacuum vapor deposition method, sputteringmethod, deposition methods sol-gel method, etc. Sputtering method is a mature methodwhich can be used to fabricate WO₃film of high purity and density. It has been widelyapplied in the industrial production. Large amount of WO₃target material will beconsumed when Sputtering method is adopted to fabricate WO₃film, therefore there is aextensive market need for WO₃target material. Nevertheless, the report about WO₃targetmaterial fabrication is rare. There exit some defects including low density, impurecomponents and. An obvious gap needs to cover to achieve the industrial application. It isof great value to study the techniques to fabricate WO₃target material of high purity anddensity.In order to fabricate WO₃target material of high purity and density, we prepare to doresearch from three aspects consisting powder making, shaping and sintering which arenecessary to fabricate the perfect WO₃target material. The specific research contents areas follows:（1）The fabrication of WO₃powder of high purity, high sintering activity and finepressing property;We choose homemade high pure tungsten oxide （>=99.99%） as raw material and adoptthe low-energy ball-milling method to prepare experimental powder in order to discuss theeffect of Ball-milling crushing mechanism, process and transmitter on powder size,construction and purity.（2）Optimizing the press technology of WO₃ceramic;Mould press the WO₃powder under different pressure （To avoid inclusions, Carbideinlay mold of high hardness, high wear resistance whose main chemical composition is tungsten is used）. Analyse the relationship between pressure and green density and itsdispersion. Discuss the optimal press process.（3）Optimizing the sintering technology of WO₃ceramic;To avoid sublimation of WO₃during shaping process, the whole process are in oxygen.Discuss the influence of sintering temperature and green density on sintering density tofind the optimal sintering technology.