Research On Technology In The Chemical-mechanical Polishing For Aluminum Alloy

Due to its good mechanical properties and low density, the aluminum alloy hasbeen widely used in the engineering fields where the product’s portability is required.Although the preeminent mechanical properties of aluminum alloy is good forexpanding its applications in engineering, but it texture is soft, low hardness，makingit easily occur surface defects，such as scratches，wear and tear in the process.Particularly，it’s usually needed to achieve very high precision and nearly defect-freeultra-precision surface to some critical or important precision parts. As a technologyof ultra-precision machining, Chemical mechanical polishing can achieve a globalplanarization of large flat surface and acquire perfect mirror surface effects. In thispaper, the removal mechanism of CMP process and the polishing process areinvestigated deeply through theoretical analysis and polishing process experiment.It introduces the application prospect of Aluminum alloy and the technology ofsurface treatment and their respective advantages and disadvantages in industry. Thenthe section reviews major academic research achievements of Chemical mechanicalpolishing, including the study of polishing mechanisms and polishing process, andthen proposes the structure and content of this article.The basic principles of the CMP are analyzed. Based on this, the principles ofchemical reaction and mechanical action are discussed，and the principle of materialremoval in the process of aluminum alloy CMP are elaborated. Then this sectionintroduces the theoretical research of CMP at home and abroad and makes the mainparameters that affect the polishing effect clear.In order to research the rough polishing test of aluminum alloy, the orthogonalexperiment is used in this article. It analyzes the influence degree of each polishingparameters to the polishing effect on rough polishing process. While，the next sectionuses the single factor method to study the fine polishing process of aluminum alloy. Inthis section the effect of each polishing parameters on the material removal rate andsurface roughness is analyzed. The precision balance is used to weigh the samples. ASuper depth of field microscope morphologies is used to observe the groundworkpiece surfaces, and a Precision surface roughness meter is used to measure thesurface roughness of the ground surface.From the viewpoint of the generating mechanism, the reason of the rising polishing temperature is analyzed. In this test，the influence of polishing parameterson the polishing temperature is spread out. Followed by is the research of theinfluence of the polishing parameters on the surface quality. And finally, therelationship between the polishing temperature and the quality of the ground surfaceis discussed in detail.In this paper，a research of the aluminum alloy polishing technology is conducted.According to the experimental results, the basic principle of the influence imposed bytechnical parameter is revealed, which is contributory to improve the application ofthis technology in the engineering field.