Preparation And Self-assemble Of Noble Nanoparticles And Basic Rearch On Its Biochemical Sensoring Application

In this paper, we carry out the fundamental research to the controllable preparationmethods and process technology of large area orderly nanostructure taking Ag as the samplematerial on the basis of existing research from lab members which is on the background ofwidespread applications in the field of orderly nanostructure in high sensitivity andbiochemical sensing and points to the technical bottleneck of nanoparticle composite film andself-assembly structure of large area, low cost, controlled manufacturing. Mainly has carriedout the following three self-assembly preparation:Nanoparticles film preparation technology based on the Ostwald Ripening effect: Todevelop a new kind of nanoparticles film preparation technology of wafer level we adopt thetraditional magnetron sputtering coating process, conduct the surface plasma to the depositedsilicon based nanoparticles thin film and realize controllable particle size and density ofnanoparticles film preparation due to the Ostwald Ripening effect.Self-assembled orderly micro-nano structure preparation technology based on theassisted physical template: In order to explore the high consistency reliable uniformity andrepeatable preparation technology of some wafer level low dimensional nanostructures, weadopt traditional MEMS photolithography technique to different morphology and size of thephysical template preparation according to the principle of electrostatic self-focusing, whichmakes us realize manufacturing of wafer level orderly nanostructure in syntheticnanoparticles and break through the technical problems of large area assembly process.Self-assembled orderly micro-nano fold structure preparation technology based onAg/PDMS: Taking Ag and PDMS as experimental material and also adopting traditionalmagnetron sputtering coating process we deposit Ag nanometer film on the pre-tension PDMSphysical fundus according to all the difference of hot coefficient of expansion and themodulus of elasticity between the metal and polymer in thermal deposition process whichspontaneously form orderly fold structure in the process of cooling and realize large scalepreparation of orderly micro-nano fold structure. Then we characterize and analyze the foldstructure morphology and make SERS test to different size of fold structure which providecertain theoretical basis for its biochemical sensing application. In this thesis, we explore and develop orderly nanoparticles and their self-assemblystructures of low cost, large area, high efficient manufacturing technology and provide basistheory and key technology to realize large area processing of true engineering nanometerscale and low dimensional nanostructures. By adjusting the key parameters in the process ofmanufacturing we achieve a variety of topography, various scale low dimensional orderlynanostructure wafer scale manufacturing providing certain theoretical basis to the large-scalepreparation of nano surface consistency, uniformity and reliability of the structure, accurateassessment and process optimization.