HL-PIII Surface Modification Of Materials With A High-voltage Pulse Chopper Charging And Discharging System Design

Corrosion, wear and tear and other circumstance will appear in the course ofindustrial parts.To extend the service life,industrial parts’ surface should be processed.TheHigh-frequency Low-voltage Plasma Immersion Ion Implantation technology(HL-PIIItechnology) is a new and high-performance materials surface modification technology atpresent. This technique overcomes the easy peeling of the film layer of the surface coatingtechniques, beam line ion implantation technology can not handle complex workpiece，thetraditional PIII technical injection element single, modified thin membrane and othershortcomings; and it can process alloying elements and antithe grinding elementsselectively; and it is able to perform a variety of surface modification process.The high-voltage pulse discharge power is the core technology equipment of HL-PIII,the power not only supplies parts of the surface injected by the ion implantation, but alsoachieves the purpose of modifying the surface, and also affects the modified filmuniformity. So it is essencial to study the discharged power pulse of HL-PIII technology.In this paper, the high-voltage pulse discharge HL-PIII technology power is stuied asan object. Charge-discharge circuit performance charger and modular is the core of thedesign, in order to achieve the high quality of the pulse output. Firstly, HL-PIII technologyand its pulse power development in the world is introduced. Secondly, the HL-PIIItechnologies application proposed a cascade overlay structure-based modular pulsedpower supply design specifications. And charger, charge and discharge module, dischargetrigger signal drive self-powered trigger signal synchronization module equalizing keyissues such as the design of the program were demonstrated.LCC high frequency resonant converter with anti-open-load and anti-loadshort-circuit characteristics, meets the requirements of dramatic changes in the chargerreactive load pulsed discharge process. Secondly, the converter can work in a state ofconstant current source and soft switch during fast charging at the same time to reduce theswitching losses. Multi-transformer primary side series structure to facilitate the design ofmodular configuration and discharge trigger signal drive self-powered. On this basis LCC high-frequency resonant converter is designed as a charger, cascade the superpositionmodular way the output amplitude1.2kV—3kV, discharge frequency3kHz—10kHz, pulsepower discharge pulse width5us—30us,rise time less than100ns,drop of less than5%.In this paper, the design of high-voltage pulse power supply with high quality outputwaveform, discharge triggered the characteristics of the drive circuit is self-powered, theamplitude of the output voltage can be flexibly configured, DSP digital control technologyis to improve the performance of the entire system. By experimental validation to provethe feasibility of the design scheme.