Design And Research Of A Kind Of Piezoelectric Tube Scanner And The Experimental System

The invention of Scanning Tunneling Microscope (STM) offers a tool to observethe atomic scale area. Following the STM, Atomic Force Microscope (AFM) isdeveloped and applied for measurement and operation in micro field widely. Butwith the continuous development of Micro-and Nano-technology, its applyingrange is becoming more and more wider. Some applications with high real-timerequirements, for example observation of chemical reaction process and monitoringof changing of life activities, cannot perform very well under the existing AFM.That is because the changing processes last merely a few seconds or less. Therefore,imaging rate should be improved while maintaining the detecting range andaccuracy. This project, which is subsidized by the National Natural ScienceFoundation, has done some work on a piezoelectric tube scanner with highperformance and its experimental systems. This project provided a solution forhigh-speed positioning, observation and operation in micro field.First, based on the analysis of advantage and disadvantage of existingpiezoelectric tube scanner with quartered electrode, a novel type of piezoelectrictube scanner with twelve electrodes was proposed. This kind of scanner combineddetecting and scanning functions together, making close-loop control in a compactspace possible. Meanwhile, the induced charge was used as feedback signal got ridof the noise introduced by high frequency in capacitance sensor, which improved thepossibility for high-speed control and scanning. Then structure parameters weredetermined and optimization design was carried out with finite element analysissoftware, to ensure the resonant frequency, working scope and so on meet therequirements.In addition, according to the working principle of the piezoelectric tube scannerwith twelve electrodes, calibration experiment system, laser optical system andcomplex experiment systems were designed. Then based on the requirements ofthese systems, components and equipment were selected and purchased. Themodeling of experiment system, part detail drawing and manufacturing were alsocarried out. At the same time, considering the vibration, noise interference in highspeed scanning and non-linear characteristics such as hysteresis and creep,Prandtl-Ishinskii(p-I) hysteresis model was analyzed and controlling scheme forhigh-speed scanning was brought out.At last, based on the designed experimental system scheme, purchased equipmentand parts, experimental systems were built and the performance are tested. Thehysteresis models and their inverse models for X-Y axes were built according to the theory principle and data. The experimental results shew that the piezoelectric tubescanner with twelve electrodes can be used for rapid positioning and p-I hysteresismodel can describe the hysteresis characteristics of piezoelectric ceramic materials.