The Pose Model Studay And Simulation Of Six-DOF Micro-Positioning Workbench Of Single-layer Structure

The article proposes a single-layer structure of the six-DOF micro-positioningworkbench, multiple piezoelectric ceramic actuators are distributed evenly between twolayers of flat, and the six-DOF position change of micro-positioning workbench isachieved by parallel drive.The major research works and innovations are as follows:(1) Mechanism design. This article presents a single-layer structure of six-DOFmicro-positioning workbench in which eight PZT actuators are distributed evenlybetween the two layers of flat. And analyses micro-positioning principle of themulti-DOF, obtains the relationship between the workbench position and PZT actuators’expansion volume, establishes the position control model, completes the workbenchmechanism design.(2) The optimal design of the structure. In order to further simplify model, thesix-DOF drive is achieved by using six PZT micro-actuators on the basis of classicStewart structure. The analysis process is similar to the (1), through that, the optimizedworkbench’ position control model is obtained, the institutional design is completed,and the implementation process of six-DOF is discussed and analysed.(3) Verify position control model. First, through a large amount of data collected,the relationship between micro-positioning workbench position change and relevantactuator’ drive voltage is obtained by data analyses using MATLAB software，and at thesame time, select target position, to obtain relevant drive voltage by calculating. ThenANSYS software simulation is performed, the above drive voltage is loaded one by oneon the solid model, compare the obtained simulation values with the target displacementvalues, through the calculation of the above, prove that the workbench design isreasonable and the positioning scheme is feasible.(4) The control system of the micro-positioning workbench. Through analyzingthe characteristics of piezoelectric actuators, the complex control system of feedforward control and integral separation PID feedback control is researched, and thefeedback signal acquisition method is analyzed. Finally, this article researches themulti-channel piezoelectric ceramic drive power designs, completes schematic andphysical map of amplifier circuit which is core part.(5) Research for experimental system of the micro-positioning workbench. It sets up the experimental system, discusses the Various components of the system modules，analysis workbench positioning accuracy and the error in the last.