Finite Element Analysis And Simulation Of The Micro/Nano-scale Contact Mechanics Behavior

Micro-electro-mechanical systems (MEMS) technology is one of most important development directions in the21St centulry. On the one hand. the research on MEMS is the demand of the modem technological progress, on the other hand it has also reflected the exploration and pursue to the limit essence of the material world. Micro/nano contact is put on the agenda, such as the elastic-plastic deformation, material roughness of the micro-surface, frictional problem of the contact surface.The project is supported by the National Natural Science Foundation of China. Micro/nano-scale mechnical is complex,contact effects occur in small areas. Moreover,experiment can not reveal the state of the contact process and various parameters. In response to this question, nanoindentation technology as the foundation, Hertz theory and finite element elastic-plastic theory were applied to analysis the different phase of contact. It is feasibility in the contact mechanics behavior of micro/nano scale.This paper, taking single-crystal silicon as the material, analysis typical spherical-plane contact model. The three pyramid, cone and square head were investigated in normal contact and tangential contact. Finally, single crystal aluminum and single crystal silicon as the material, the contact mechanical behavior in different contact depth was analyized. The research results show that deformation of the contact model showing ellipsoidal distribution in the contact area, Its region sequentially from the inner to the outer, Followed by high stress areas, the plastic deformation region and the elastic deformation region. The contact model geometry sharper, the greater the local contact stress; The larger contact area, the winder the deformation, and also the greater the amount of deformation. For the same material, with the contact depth increases, the amount of deformation of the contact area increases, causing the greater unrecoverable deformation amount. For the contact mechanical behavior of different materials in the same contact depth, single-crystal silicon better than the single-crystal aluminum, such as elastic-plastic deformation, stress distribution, elastic-plastic energy density is much.Micro/nano-scale contact mechanics, is applied to guide the the actual micro mechanical design and analysis. In the paper, we analyzes the micro-gear contact mechanics. The results show that the stress variation in the contact process, and the material properties of the gear meet the strength of the contact process. There is no collision and impact, broken teeth, pitting and glue gear common effectiveness phenomenon.