Research On The Magnetron Sputtering Preparation Of Si-Tianode Materialand Its Performance

It is supposed to a potential commercialization of high capacity anode materialsbeacause of the excellent capacity, which is10bigger than the capacity of the graphite.In this paper, I prepared the compose of silicon and titanium thin film anode materials,and have a further research on the preparation of silicon and titanium thin film processand its electrochemical properties of the anode materials. In order to optimize thesilicon and titanium thin film, we deal it with three aspects are atomic ratio、the powerof rf and the thickness of film. I character the silicon and titanium thin filmmicrostructure and structure by the method of XRD、SEM and other ways. I used theC-V、EIS、Cycle performance to character the electrochemical properties.This paper discussed the process of the magnetron sputtering by four factors,they are the rotationl speed of substrate、working press、the temperature of substrate、the roughness of substrate and the temperature of annealing. The influence ofsubstrate speed affects the thin film of thin film deposition rate and uniformity of film;Working pressure influences the density of thin-film material. The roughness ofsubstrate temperature and fluid collection process will affect the bonding force withsubstrate material. Heat treatment on titanium silicon thin film even though materialsthe crystal, but the material’s microstructure has changed a lot. Get material for thefirst time to take off the lithium capacity of1411mAh/g, for the first time efficiencyis82%, while in the process of circulation, slight fluctuations, average every time theattenuation of less than0.2%, but after25times per cycle, the specific capacityremained at1344mAh/g, keep the capacity retention rate of95%, the cycle stability isvery good.Then the film is optimized, by comparing the proportion of various materials forSi:Ti=5.1:1, embedded lithium capacity of1958mAh/g, for the first time after50cycles, lithium capacity not less than1700mAh/g, the capacity retention rate of noless than86.8%. It is obtained by comparison of film under different power rf power:98w intermediate frequency power:3w the intercalated-li capacity is1912mAh/g, forthe first time, after50cycles off lithium capacity not less than1851mAh/g capacityremain at a rate of96.8%. The different thickness of the thin film preparation, bycomparing the thickness of the thin film can know the thinner, the film cycleperformance, the better, this experiment in the thin film thickness to1.4μm, through the way of limited capacity, through300cycle, capacity remain at100%. When thefilm thickness more than1.4μm cases, both appear in different degree of capacityattenuation.