Test Methods Of The High-Precision Planar Motor

Permanent magnet planar motor which can generate plane positioning movement by the electromagnetic force directly has extensive application prospect in high precision positioning device of IC equipment due to its superior performance, such as simple structure and high positioning accuracy, low heat loss, fast response speed. It is significant to research the planar motor performance parameters test technology which is the important guarantee of making it into products.And this article devote to examining the measurement of the magnetic field of array permanent-magnet, the thrust fluctuation and the temperature rising based on the analyzing of the planar motor’s magnetic field and other parameters.Firstly, we simulate the spatial three-dimensional magnetic field which excited by planar motor using the scalar magnetic potential method and the finite element software. Then we determine the position to put Hall sensor and the measurement of magnetic field as long as we get its spatial distribution pattern and amplitude range.Secondly, analyzing the static thrust fluctuation and dynamic thrust fluctuation of the planar motor using analytical method and finite element method respectively. Results show that the Fx is a sinusoidal distribution, Fy is almost zero when the active cell moves along the X direction. Then excogitate the thrust fluctuation conclude device according to the thrust fluctuation size of planar motor which compose of linear motor which put horizontally to play as the load for the measurement and ball screw that put vertically to limit the movement of active cell along vertical direction.Thirdly, analyzing the characteristics of temperature field through a model of3-D transient temperature field. We draw the conclusion that the planar motor’s working temperature come into balance after a period of time at the atmosphere. Designed a method of testing the motor temperature with embedded thermal resistance.Finally, we did some experiments on detecting the magnetic field of array permanent-magnet and the temperature rising. The result show that the magnetic field of array permanent-magnet is a sinusoidal distribution, the temperature field could come into balance in a short time at the atmospheric pressure which support the rationality of the magnetic field distribution and the temperature rise measurement.