| Direct drive XY table system based on permanent magnet synchronous linear motor,biaxial mismatch, model uncertainty, system uncertainties and external disturbance have aserious impact on the contour precision, the paper design passivity controller of XY tablesystem based on velocity field. The use of velocity field compiling the system inputtrajectory, design the passivity controller to improve the XY table servo system precision.First, the paper introduces the structure characteristics and basic working principle ofthe permanent magnet synchronous linear motor. Establish XY table system mathematicalmodel. Reading and analyzing large amount of foreign and domestic references about thedirect drive XY table, on this basis, introduce the permanent magnet synchronous linearmotor and the XY table system control method. Model uncertainty and externaldisturbance of XY table system are analyzed, and the method that reducing system contourerror are summarized.Secondly, in order to solve the biaxial mismatch of XY table, establish a velocity field.The velocity field compiles the position command for speed. The coordination problem oftwo axis charges for single speed problem. Accordingly, the velocity field can improve thedegeneration and instantaneity, it greatly improve the system robustness and reduce thecontour error.Then, for the XY table system, model uncertainty, the system uncertainties andexternal disturbance have a serious on the system, the paper design a passivity controller.Analysis the closed-loop XY table system from the perspective of energy, guaranteebetween the system and the external disturbance is passivity, improve the stability of thesystem. Design the passivity speed controller based on lyapunov function, improve theconvergence rate of the velocity error, and velocity error closes to zero.Finally, in order to further solve the uncertainties and external disturbance, the paperdesigns an adaptive disturbance compensator. The main advantage of the adaptivedisturbance compensator is compensating the gain according to the current error state. The passivity controller based on the velocity field can effectively weaken the influence ofexternal disturbance and parameter perturbation, the simulation results show that passivitycontroller based on velocity field effectively improves the contour accuracy androbustness. |