MWIR Fizeau Interferometer Key Techniques And Application Of Phase-shifted

Infrared interferometer is indispensible in the test of spherical surface and a spherical surface with high precision. And because of the special wavelength, mid-infrared interferometer has more important position in the fields of optical application in military, aerospace, energy. At the requirement of the domestic optical industry, this dissertation focus on the key technique in the development of mid-infrared interferometer.The present development situation of the infrared interferometer is summarized. After analyzing the principle of the infrared interferometer, the design of Fizeau phase-shifting mid-infrared interferometer with an aperture of100mm is proposed on the base of the existing Fizeau laser interferometer. The new design includes a new kind of optical path (double triangle form) and improvement of the phase-shifting algorithm.I describe how I install and adjust the Fizeau phase-shifting mid-infrared interferometer in this paper. Also the calibration of the wide-rang phase shifter and the stray light in the mid-infrared optical system are discussed in this paper. Then I describe how I build the Fizeau phase-shifting mid-infrared interferometer of the wavelength4.41μm, which has an aperture of100mm.Meanwhile, some test are performed for several typical application of this interferometer, including the test of an a spherical surface with an aperture of20mm and the test of the refractive index homogeneity of a chalcogenide glass with an aperture of30mm. The results are showed as rebuilt wave front. Also the uncertainty evaluation is performed with some standard lens. The uncertainty got is λ/169(λ=4.41μm).