The Semiconductor Manufacturing Equipment Operation Management System Of Research And Application

In Semiconductor manufacturing enterprises, manufacturing equipment lays the foundation of those corporations’productive and supervisory activities. With the fast development of semiconductor technology in the past three decades, the competition among these corporations is becoming fiercer and fiercer. Therefore, how to manage, use and improve the level of using it becomes more and more important not only at enhancing those corporations’ability of competition, but also at promoting their development.With the continuous development of the Semiconductor industry, put higher request to system development of equipment management. The equipment management system not only manages equipment, but also the equipment operation, such as the asset depreciation, spare parts management. Need the management system associate with equipment operation, and consider how to make the equipment in the process of production to improve utilization rate, reduce the defect rate, and increase the profit of the enterprise. And these requirements have gradually become the common requirements in Semiconductor enterprise as current incentive competition circumstances. The Semiconductor manufacturing equipment operation management system designed and implemented by this dissertation is around the themes. This thesis through study and use the log files of semiconductor equipment, retrieve the useful information of equipment operation from the log files, such as the PCS data, machine alarm code etc., so that to obtain the real-time and accurate equipment running status. By analyzing the status, keep the equipment is always running under the best condition. And this system has realized the tracking, record, escalation and Best Known Method management process in equipment maintenance. A systematic management system of equipment operation is realized under High Volume Manufacturing.In this thesis, various concepts in the system are introduced first, and then requirements according to system requirements are analyzed in detail. In accordance with the requirements of the various components of the system, suitable components are designed and difficult points are treated in advance. Through prototype design, function design and database design, combined with computer software knowledge step by step to complete the design of the whole system. Finally, a complete and robust system is realized. The system development and running platform uses Microsoft’s Visual Studio platform, C#language development, the batch file for the log file diagnostic and MySQL database. Due to the fact that the users of this system are the employees in office and production floor, the network distribution is dispersed. The Internet Explorer is beneficial for deployment, upgrade and access.Above all, the thesis has researched a practical way to manage equipment automatically in the semiconductor field, has put this system into practice and has made the maintenance of it much more accurate, automatic and timely. Meanwhile, the system is beneficial to the management of the semiconductor manufacturing equipment and the improvement of products’quality, thus presenting others an available way to learn from. As a consequence, the research is of great importance and will be rather meaningful.