Flow Field Study Of The Excimer Laser Based On Computational Fluid Dynamics

In the field of photolithography technique of large-scale integrated circuit technology,in order to obtain a more stable and smaller size of the micro-processing, the stability of thelaser output has a high demand. The lasers require stable downstream field parameters inhigh repetition rate, this proposed new requirement for the study and design of the laser gascirculation system. The flow field of the alignment of molecular gas laser was studied byusing the computational fluid dynamics theory and software.First, introduces the principle of laser excimer laser and the internal structure of anexcimer laser. Analysis main factors affect the flow field distribution of an excimer laser.Combined with the knowledge of hydrodynamics and the fan, the fan selection is done, anddetermines the key device of the laser gas circulation design principles.Secondly, establish mathematical model of the laser gas flow chamber, mainlyconsidering the structural design of the cross-flow fan. Use Gambit software modeling andmeshing, on the basis of understanding the basic concepts of numerical simulation and thecorresponding method, combined with the Fluent software functionality, find out theaccurate and efficient numerical simulation method.Then, according to the laser working conditions, select the appropriate boundaryconditions, using Fluent software to solve the flow field’s distribution, access to a largenumber of velocity fields, pressure field data. In the post-processing, by using the Tecplotsoftware to extracts the discharge area of the flow field information, obtain the lateraldistribution of the airflow velocity between the electrodes. By setting different fan structureand contrast, discussing the changes of in-depth of fan structure parameters on the velocitydistribution.Finally, by using the schlieren method which is one of the optical detection methods, tomeasure the speed of the excimer laser cavity, and comparing the test results with thecorresponding calculation model results, in order to verify the correctness of the simulationprocess. Make a summary of the research work proposed can be improved and prospects forthe future.