Research On The Precision Distance Measuring System Based On The Laser Interferometer

The measurement is very important for humans to understand and transformnatural. In modern industry, from the machining to the mechanical assembly andadjustments, the precision measurement is required. Otherwise, we can not guaranteethe quality of the product. So the precision measurement technology has an importantpractical significance. In the field of nano-measurement、bio-engineering、materialsscience and ultra-finishing, the technology has broad application prospects. In Thedevelopment of our defense industry and the national economy, this technology hasimportant significance. The content of this paper and the main work is as follows:1、According to the tracker work requirements, the paper introduce an incrementalinterferometer measurement principle and an absolute interferometric measurementprinciple. In the tracker off light process, the paper tell us how to switch between twomeasurement methods. It is significant for us to improve the tracker continued by theprecision.2、This paper introduce a technique, which technique is to stabilize thesemiconductor laser frequency，the technique called Pound-Drever-Hall. This paperpresents the simulation of the relevant parameters. The simulation experiments showthat the method has good frequency error output. Simulation results show that themethod has great reference value for the semiconductor laser frequency stabilizationdesign.3、This paper analyzes the principle and phenomena of the interference. This paperintroduces an optical path of the Michelson interferometer. According to thecharacteristics of the interference signal, we use a conjugate suppression method, It isefficacious to suppress interference noise and improve the measurement accuracy.4、In order to improve the signal-to-noise ratio of the interference signal and meet the tracker target speed, a high interference rejection capability, wide bandwidthinstrumentation dedicated three-op-amp integrated amplifier MAX4445is used. Theresult of experiment show that the system can achieve the micrometer accuracy whenthe target moving at a speed of4m/s, which was the same as the measurement accuracyachieved when the target moving at a lower speed, that the design met the qualificationof the tracker system.5、Segmentation method is proposed based on a secondary breakdown of thethreshold of interference signals. An accurate subdivision of the presence of quadratureerror and amplitude error signal can be achieved by setting the threshold value of theadditional blind. Dynamic range allocation method is used to eliminate the initialinterval error and to achieve precise breakdown. This method can count from the signalDC level drift and high-frequency disturbance. With the subdivision using thistechnology, the precise distance measurement system will have a strongerenvironmental adaptability and anti-interference ability. The system is more applicableto the project site applications.