| Nano metrology and manufacturing technologies have become the focus of international technological competition, since nanotechnology promotes the innovation and development in research areas such as biomedicine, material science and information technology. An atomic force nanomanipulation system obtains the sample surface morphology, characterization of nanoscale materials and precise control of nanomanipulation by detecting the interaction force signal between the probe tip and the sample surface. In this thesis, with the support of International Science and Technology Cooperation project "Robotic Nanohandling and Its Application in Biomedicine"(2012DFA11070), a signal detection system of dual-probe robotic nanomanipulation has been designed, and implement morphology characterization, measurement, and3-D manipulation of samples.The main research contents and innovative approaches of this thesis include the analysis of the force interaction between the probe tip and the sample surface, AFM imaging and manipulation techniques. A method of feedback signal detection of probe cantilever deformation has been proposed and developed. A signal detection system for dual-probe nanomanipulation has also been proposed, and the morphology detection of samples, the sample size and repeatability measurement, and the detection of force interaction between dual-probe and samples have been carried out in air. The drive source of the probe tapping-mode has been designed. |