Research On High Speed Jetting Dispenser With Displacement Amplifier Based On Flexible Hinge

Dispensing technology is one of the key technologies of microelectronics packaging industry. It’s a controlled way to distribute fluid accurately. On/off valve jetting dispensing technology, compared to other jetting dispensing technology, has wide scope, high efficiency, and consistency, had been considered to be next generation dispensing technology. To overcome the shortcomings of domestic dispensing technology, the purposes of this thesis is to design a piezoelectric-stacks driven on/off valve jetting dispenser with independent intellectual property rights, to realize high frequency micro scale dispensing. The main work of this thesis is:(1) The design scheme of displacement amplifier was presented, the parameters of the amplifier were decided by finite element analyzing. Prototype of the designed amplifier was manufactured and tests of the prototype showed the output of the amplifier can be367μm while the driving piezoelectric stack was connected to200V signal, which was fit with the simulating result, fulfilled the requirement of on/off valve jetting dispenser.(2)Theoretical analysis had been applied onto the working progress of on/off valve dispenser as the fluid dynamic model was established, guided by these theory, compared jetting performance of tapered surface to tapered surface, spherical surface to tapered surface, and spherical surface to spherical surface fitting forms by fluid dynamic analysis, based on the consideration of practical application spherical surface to spherical surface fitting form was chosen, the influence of the lift and velocity of stem is simulated and analysised.(3)The overall design and the assembling of the dispenser was completed as a stem-seat grinding device was assembled to ensure the sealing of the stem-seat sealing. A complete testing system with subsystems including piezoelectric-stacks temperature measuring and piezoelectric-stacks driving is built.(4) Glycerol was used as dispensing materials after comparative analysis. Testing and analyzing of influence of feed pressure, voltage and frequency was accomplished. In the tests, the highest jetting frequency reached400Hz and minimum diameter of jetting points is525μm by testing with glycerol/alcohol mixture which viscosity is180cps.