| With the continuous progress of science and technology and the development ofindustrial engineering, micro-positioning technology has become a key technologywhich is used by researchers for further study from the macro to the micro domain.Because of serveral advantages, such as high resolution of displacement, no heatgeneration, unsusceptible to electromagnetic interference, the piezoelectric ceramicmaterial has become an ideal micro-positioning drive element of Micro-positioningsystem.In order to satisfy the needs of piezoelectric ceramic micro-displacement drivepower supply which is applied in phase shift technology of Digital SpeckleInterferometry, the main design and research work of this dissertation is as follows:First, the structure design of drive power supply is proposed by using voltage-controlled of DC amplifier type structure, based on the research and analysis ofPiezoelectric micro displacement actuator driving power supply control mode and itsadvantages and disadvantages,as well as the present research situation. At the sametime, the design goals of control strategy how to realize the adjustments of output DCvoltage and theAC sine wave, triangle wave amplitude and frequency are proposed.Overall structure design of Drive power is completed, including both thehardware and software.Second, an analysis of the hardware and software design as the two components ofdrive power is taken. Hardware circuit of power supply is composed primarily by themaster chip and its peripheral modules, the waveform generator module, the D/Aconverter module, the power supply module, the linear amplifier module and thehuman-computer interaction module. After receiving commands from the host, themaster chip of hardware circuit controls D/A converter module to get a0.3V~4.7Vanalog voltage output, getting a-110V~110V DC piezoelectric ceramic’s drive voltageafter linear amplification. And controls the amplitude and waveform generator moduleto get an adjustable frequency sine and triangle wave voltage output. At the same timethe microprocessor reads the actual voltage of the acquisition module and compares itwith the one from ideal output, to increase the accuracy and stability of output voltage.In addition, the microprocessor can also achieve the above operations through theman-machine interaction module.Corresponding software of the power supply isdesigned, including the PC software and programs of microprocessor initialization, virtual USB communication response procedure, D/A control, waveform generatorcontrol procedure, voltage signal acquisition process, and human-computer interactionprocedures.Finally, the drive power supply is produced and its performance test platform isbuilt. Static features of the power supply, including repeatability,linearity and stability,are tested. At last, related experiments of frequency response characteristics and theripple parameters of the power supply are also conducted.Test results show that the drive power is stable, basically achieve the desiredobjectives. |