Research On Organic And Inorganic Double Layers Optical Waveguide Delay Line Device

With the development of the photonics industry, people set their sights on thedirection of integrated research on organic and inorganic device. Dependent on thestability of the inorganic material at the same time, and people constantly explore newproperties of organic materials. In this thesis, it describes the study of organic andinorganic double layers optical waveguide delay line, double layers include polymer andsilica. People use organic materials compensate for the lack of inorganic materials, andfabricate integrated device of versatile and cost-effective.In this paper, the delay line device which is used to radar systems was manufactured,in particular for optical phased array radar. The device is small and light, it can improvethe performance of radar, and radar can anti-electromagnetic interference. Experimentalwork includes: selection of materials, production of waveguide devices, explore theexperimental conditions, design layout, optimizing the production process. Thefabrication and test of the delay line device, including loss, delay time. The outputinfrared pattern was obtained.Aspects of organic materials: UV-curable polymer material is selected NOA, andNOA is used for the manufacture of the cross optical waveguide delay line. Refractiveindex is calculated, including NOA61, NOA63, NOA73, NOA74, NOA88. After thecoating, the film formation of NOA was determined, it is less than1nm. The core materialis SU-8, cladding material is PMMA, curved optical waveguide delay line device is beingprepared by them, and the device is being tested. The output infrared pattern was obtained.To reduce losses, cross section of device is polished by using polishing equipment.To make the process of exploration, under different experimental conditions, Twomethods of device fabrication：Including optical-writing and nanoimprint. The exposuretime of optical writing was200S, distance that between mask and film is less than50μm.About nanoimprint technology, the device is manufactured by imprinting on the mold.Core is NOA61, cladding material is NOA63. The exposure time was300S. Waveguidestructures of Ridge and quasi-rectangular were manufactured.For the aspects of inorganic materials: An integrated4channels silica optical waveguide delay line with low cost and low propagation loss was demonstrated andmanufactured. BPM software was selected to simulate the associated parameters,including Y splitter, bend loss. In order to reduce the device size and insertion loss, thesmallest bending radius of the delay line was selected to be1500μm. And the structure ofoptimizing gradient Y splitter and right angle intersecting waveguide were optimized. Thecross waveguide delay line device was manufactured by semiconductor manufacturingprocesses. The output infrared pattern was obtained. The delay time of each channel was0ps,113ps,226ps and339ps, respectively. The4channel silica waveguide delay linedevice can achieve an equal interval of delay time between the adjacent channels. It canbe integrated with itself for several times to increase delay time. The output waveguide ofthe device can be integrated with the optical fiber array at the same time.Secondly, The test system of delay time device was set up, Vector Network Analyzeris the main part, The delay time is calculated by measurement methods.Finally, Feasibility of the method is to be discussed about organic and inorganicdouble layer optical waveguide delay line. In order to manufacture the polymer opticalswitch, slots are carved on the surface of the device, and slots are rectangular structure.Silica waveguide delay line device can be integrated with the polymer optical switch.Integration of active and passive device is realized. In the process, the feasibility ofintegration is discussed.