Research On The Design And Fabrication Of A Mems Sensor Based On Multiferroic Nano-Fiber

Piezoelectric pressure sensors are widely used in MEMS (Micro-Electro-Mechanical System) devices. A thin film or bulk is the typical sensitive material in these sensors. Compared with film and bulk, a Clamped-Clamped Beam structure multiferroic nanocomposite fiber has great length to diameter ratio, which can enlarge the displacement caused by the piezoelectric effect of sensor making it possible to improve the sensor performance. This paper made theoretical analysis and structural design to a kind of MEMS piezoelectric pressure sensors based on multiferroic nanofibers. Through the study of MEMS processing technology, designed a process flow for preparing the sensor and made it.First of all, designed a kind of MEMS piezoelectric pressure sensors based on multiferroic nanofibers. Based on basic knowledge of micro pressure sensors, small deflection theory, piezoelectric effect of the fiber and some other related knowledge, made theoretical analysis and dimensions for the sensor. As compared with different structural dimensions of the sensor, its output voltage is improved.Secondly, according to the principles of analysis, structural design and theoretical calculations, combined with the specific conditions of the laboratory, design a process for preparing multiferroic nanofibers MEMS pressure sensor. Make research for micromachining technology for nanofiber production process. Multiferroic nanofibers prepared by electrospinning based on sol-gel precursor solution prepared. Combine it with metal interdigital electrodes and the cavity of silicon substrate prepared by MEMS technology. So, a process flow planned according these.Finally, according to the process flow made the sensor. By adjusting the above process steps, studied the preparation of nanofibers and improvement of sensor performance. Analyzed some affecting factors of the experiment and obtained the specific process parameters. In the end, completed the production of the MEMS piezoelectric pressure sensors based on multiferroic nanofibers, tested the multiferroic nanofibers and sensor.