| Transparent conductive films (TCF), due to its high conductivity and high transmittance in visible range, have been widely applied in optoelectronic devices. The application of traditional indium doped tin oxide(ITO) TCF has been severely restricted by its non-flexibility. In recent years, the carbon nanotube film has attracted much attention because of its good photoelectric performance, especially its good mechanical property. However, the high resistivity and bad surface morphology, which limited its promising application, need to be optimized.A flexible multilayer film with a structure of CNT/Ag/AZO with high conductivity as well as high transmittance has been obtained. The CNT film used here was obtained by spray coating. Ag film and AZO film have been deposited successively to CNT film by magnetron sputtering method in order to improve the conductivity and modify the film surface morphology. Ag can have a good transmittance as well maintain its excellent conductivity when the thickness less than a certain value. By depositing an AZO layer, who has comparable optical and electrical properties to ITO, can greatly improve the transmittance of multilayer film. Ag film and the AZO film have been deposited under different technological parameters in order to get optimal CNT/Ag/AZO film. The influence of different Ag film and the AZO film on the surface morphology and photoelectronic performance of CNT/Ag/AZO have been studied in detail. The results shown that crystallization of each film under different parameters were critical to photoelectric and flexible performance of CNT/Ag/AZO. Along with Ag crystallized to form a continuous film, the transmittance of CNT/Ag/ AZO multi-layer film first increased then decreased, while its sheet resistance reduced a nd mechanical property enhanced gradually. By using Haacke’s figure of merit a flexible CNT/Ag/AZO with best quality has been obtained. CNT/Ag/AZO multilayered film obtained under the optimal parameters showed a transmittance of 72.3% in visible region, a sheet resistance of 7.61Ω/□ and a stable 9.6Ω/□ before and after bending test respectively.A flexible touch screen based on the CNT/Ag/AZO multilayer with good performance has been fabricated. The CNT/Ag/AZO film prepared under the optimized conditions were utilized as pattern electrodes on the top and botton substrates. The insulating property of RZJ-304 film obtained under different spin coating speed has been studied. Finally by packaging the top and bottom substrates, a two-point capactive touch screen prototype device with a matching control circuit has been obtained. The performance of the touch panel has been tested. The results shown that the average transmittance in visible range of it was 68.433%, and the linearity was 1.92%. The device based on CNT/Ag/AZO film realized detection of touch location and reached the basic function of touch panel. |
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