Study On The Synthesis Of Disilane

Disilane is a kind of electronic gas which is mainly used in solar cell and electronic products. Now, we mainly use silane as amorphous silicon thin film deposition in the production of amorphous silicon, but disilane have characteristics of faster deposition rate and lower deposition temperature compared with silane so that disilane’s market prospect is very big.This experiment is based on the existing laboratory conditions and selects the preparing halogenated silane reduction method to making disilane gas. Disilane is an extremely dangerous gas, when its content is above 0.2% and meets the air, it will instantly burn and explods. because of this risk, we need to hand the reactant early, then we explore and identify a set of safe process route for making disilane in the laboratory.Through the contrast test, we determin the optimal reaction conditions of this method。 The best reaction temperature is 0 ℃. It is concluded that adding Na AlH4 to Si2Cl6 and adding the reactants Si2Cl6 for 2 times as well as joining Na AlH4 for calculation, the purity of disilane is higher.We mainly use the helium ionization gas chromatograph to detect disilane and do the auxiliary detection by gas chromatograph-mass spectrometer. In the process of detection, the gas chromatograph sample online detection system is designed and through the test data, we determine the injection pressure so that we can ensure the accuracy of testing data.In the laboratory, through activating carbon adsorption to remove impurity gas in the disilane, we find that it can only remove part of the CO2, CO, etc. This is consistent with the basic theory.