The Mechanical Properties And Substrate Temperature Of Metallic Glass Thin Films

In 1960, Unexpectedly Duwez found that Au-Si alloy could form disordered long-rang structure if the cooling rate was very high, when he did research work on it. That is so-called metallic glass after then. And before that the structure of solid metallic alloy was considered to be well-organized and ordered. Due to high cooling rate at 104-106 K/s, the metallic glass size was too small to devote it to practical application. In 1980, Turnbull developed Pd-Ni-P metallic glass with size of more than 10 mm at 10 K/s cooling rate, which meant application of metallic glass would come true someday. In the year of 1996, Inoue put up with three empirical regularity in order to find out new amorphous alloy with greater glass formability. With the help of Inoue and other researchers, the size of metallic glass became larger and larger, So far, the largest size that has been reached is 80 mm.In this work, we prepared W-Ru-B 、Cu-Zr、Zr-Cu-Ni-Al and La-Co-Al metallic glass thin films by magnetron sputtering (DC) and statistic its first pop-ineventby nanoindentation, we found out that all of the samples shown single-model distribution except for Cu-Zr.which present bi-model distribution, especially we tried to find out the relationship between STZ and shear yield strain and found that with higher activation energy, the shear yield strain is larger. In addition, we prepared Ni-Nb metallic glass thin film at various deposition temperature and found that as the deposition temperature goes up, the roughness and column structure size increase, furthermore, the density and Young’s modulus are proportional to substrate temperature.