Research On The Method Of Micro-forrecseeb March On The Method Of Aseeads Uonre Lmeevnetr And Tracing Based On Lever

With the development of high and new technology, such as the microsystems,new materials, and Micro-nano processing, in which the measurement ofmicro-nano-level force plays a key role. So the position of the applications andmeasurements of micro-nano-level force become more and more important in thescientific development.A micro-force measuring and tracing technology based on lever principle ispresented. And make theoretical analysis on feasibility and the principle of theprogram and electrostatic force producing, and build experimental test platform tomake a series of experiments to verify the reasonableness of its application anddesign. The main works contents are as follow:1. Analyzed the significance of the micro-force measurements to sciencedevelopment, and summarized the development situation about the micro-forcemeasurements of the domestic and overseas. The research emphasis, difficulties andworking direction are determined.2. Made the mathematical model of electrostatic force producing, and analyzedcapacitance gradient and the influencing factors of cylindrical capacitive sensor.3. Made stress and strain analysis to the mechanical transmission part by theansys finite element method, and analyzed the transmissions mode and parametersof the transmission mechanism. Designed and compared a variety of levermechanisms, then broke through the stiffness bottleneck of the small forcetransformation and transmission, and determined the scheme of the levertransmission mechanism design, then analyzed the impact factors to the stiffness.4. Make sure the system demand and composition of the micro-force measuringand tracing program, and analyze the design of various components module, thenbuild the experimental device platform.5. Designed the system interface of PC by using VC++, including severalfunctional modules such as image acquisition and processing, concentricityadjustment, capacitive gradient measurements and laser foot displacementacquisition etc.6. Made a series of experiments using the experimental device platform, suchas capacitive gradient measurements, Transmission mechanism stiffnessmeasurement and tiny force and tiny mass measurements etc. And analyzed the results of these experiences, the system is able to complete the small forcemeasurement and traceability work preliminarily.7. Summarized the influence factors of the whole system, and made severalproposal of appropriate improvements according to the experimental results andproblems in the process.