Researching On Trans-scale Precision Positioning Stage Based On Stick-slip Drive

The rapid development of nanotechnology requires an increasingly complexmanipulation strategy. In which, the automation precision manipulation of the objects innanoscale is one of the indispensable basic means. For example, the micro driveprecision positioning technology has been more and move used in micro surgery,scanning probe microscope, atomic force microscope AFM, optical fiber, micromachining, semiconductor plate, and so on. Compared with traditional precisionpositioning technique, the scale of the operating object is very small in nanometermanipulate. The SEM is accepted to observe, identify and monitor. Besides, themanipulator used to operate and adjust the objects, is needed to have the positioningprecision of nanoscale with millimeter movement stroke and the machinery dimensionitself should be small relatively. So it is of urgent significant to develop the trans-scaleprecision positioning technology with nanoscale positioning accuracy in millimeterstroke and small dimension. And researches about the formation and realization methodof precision motion have important theoretical and practical value.Under the project support of Jiangsu province outstanding youth fund, this paperset up the theory model of stick-slip driven based on the analysis of stick-slip drivemechanism firstly. Based on the piezoelectric ceramics and the dynamics model offlexible hinge, the stiffness matching features are comprehensive concerned. Moreover,the simulation of the total structure was carried out based on the analysis of hysteresisperformance and flexible hinges models. Finally, according to the current problemsexisted in stick-slip drive, the structure design and optimization is put forward. Theprototype is processed and the some verify experiments have been done.In the research of stick-slip driving trans-scale motion theory, we studied themovement relationship between the active part and driven part. In addition, we analyzedthe motion process of stick-slip motion and understand performance of each part indifferent phases. In the research of drive and transmission system, based on the dynamic models ofpiezoelectric actuator and flexible hinge, we understand the dynamic characteristics ofthem. Besides, the integrated modeling of the stage was built. According to the equationof stick-slip drive, we analyzed the influences to the movement of the stage, such asdriving frequency, load, the dynamic and static friction force and so on, which canprovide a theoretical basis for design.In the system design and experiments, according to the analysis result of thestick-slip driving system, we designed the platform. Concentrated on the currentproblems in stick-slip drive as the load change influence and the pre-tightening force,we designed a new type of stage. Through experiments of the driving system, thedynamic model is proved to be correct. We measured the performances of the stage,such as the displacement and velocity, the resolution of movement, eta.. Moreover, weanalyzed the effect of step time and quality of load to the stick-slip system in the paper.Through the analysis of different parameters of the test results and the theoretical modelas well as the simulation results, we established an evaluation standard of stick-slipdriving to verify the correctness of the stick-slip mechanism and model of drive system.