Research And Application Of Detection Technology For Large Planar Optical Component Surface

Large Plane optical components in the Inertial confinement fusion system are demanded with a large nμmber,they are also expensive and with a high precision of the surface morphology. At present, all of the large aperture interferometer、Ricky- Commoner detection and sub-aperture stitching method can detect the surface morphology. As the large size of devices used in those method,it’s hard for them to detect the components in declining. The Angle Difference Law(ADL) is an effective way for such applications as the morphology detected by the angle diffrerences along the scanning path.In this paper, target of the image processing algorithm has been figured out by dealling with the ADL morphology reconstruction algorithm,the image processing algorithm and the software system has been designed and implemented. The main work is as follows:1,The principle of the ADL has been studied and the algorithm of surface morphology reconstruction has been analyzied,and target of the image processing algorithm has been figured out that must be higher than 0.2 pixel.2,An image processing algorithm of laser spot centroid positioning has been designed and implemented. The algorithm is based on the traditional gray weighted centroid method and divides the spot much more circular by convolution and calculates the centroid much more stable by 3 ? model. Experiments show that the accuracy of the algorithm is better than 0.1 pixels, and its high stability.3,An software system for the ADL based system has been designed and implemented. The sofrware is based on the multi-process architecture. Experiments show that the measurement accuracy of the ADL based system is up to λ / 3 and the repeating accuracy is up to λ / 10(λ=632nm) for components with 400mm×400mm.