Preparation And Properties Of Ti Doped LiMn₂O₄ All-solid-state Thin-film Lithium Ion Battery

In recent years, all solid state thin film micro batteries used in micro electromechanical system, much attention has been paid to the development of the electronic system[1-2]. Tiny devices must match with the the corresponding micro power supply for the specialized requirements of power integration, flexible, overall dimensions[3-4]. All solid state thin film lithium ion battery with its advantages of small volume, high safety and high energy density, was applied widely in tiny electronic products and electric vehicle. This article summarizes the development of all solid state thin film lithium ion battery, and analize the research progress ofthin film lithium ion battery and electrode materials battery at home and abroad. In view of all solid state thin film lithium ion battery cycle performance and the electrochemical properties of this thesis, we study the Ti doped Li Mn2O4 cathode material, the preparation of lithium ion battery anode film material V2O5 and performance. On the basis of the preparation of the structure of V/ V2O5 / Li PON/ Li Mn2-x Tix O4/ V all solid state thin film lithium ion battery.In this paper, using RF magnetron sputtering technology and with homemade V2O5 ceramic targets for sputtering target source, prepared the anodic V2O5 film. It analyzed surface topography and transitive phase and state performance of V2O5 film prepared under different conditions(argon oxygen ratio,sputtering power, gas pressure),and electrochemical properties of single thin film batteries. The test results show that, the V2O5 negative films for single battery has better electrochemical properties under the condition of gas pressure is set 1.2Pa, and when the V2O5 films were prepared by sputtering power to 120 W,16% oxygen partial pressure as well as more uniform grain V2O5 thin films, smaller surface roughness, better crystalline properties.Using RF magnetron sputtering technology, with homemade Li Mn2O4 target source for sputtering target material, metal Ti for doping source target material,prepared the Li Mn2O4 cathode films,and annealing it at different temperatures(T =300o C,400 o C,500 o C,600 o C,700 o C,800 o C).It analyzed surface morphology, phasestructure,electrochemical performance and cycle performance of Li Mn2-x Tix O4 film annealing under the different temperature. The results show that, under the annealing temperature of 600 o C,the Li Mn2O4 cathode film has lower surface roughness and uniform grain distribution as well as a better crystallization performance with a stable crystal structure.Meanwhile, Li Mn2-x Tix O4 films as cathode materials which under the condition of600 OC annealing treatment,prepared the structure of V / V2O5 /Li PON / Li Mn2-x Tix O4/ V all-solid-state thin film lithium ion battery on SUS304 stainless steel.Its first discharge capacity increase by annealing the 3.87μAh/cm2 to 4.48μAh/cm2, after 60 charge-discharge cycles, the discharge capacity change is relatively smaller, and the discharge capacity remained at about 4.08μAh/cm2, attenuation becomes small cycle capacity after 200 cycles as well as the capacity retention rate increased to 89.13% which is effectively improve the performance of thin-film electrochemical cycling lithium-ion battery.