Study Of Thermal Micro Flow Sensor And Its Detection System For Higher Temperature Environment

Flat micro heat pipes, known as one of the most effective heat transfer devices, provide an effective solution to the heat problem of electronic products. In order to explore the relationship between flat micro heat pipes’transfer characteristics and its designed structure and understand vapor transmission characteristics at different temperatures, this paper carried out the research on thermal micro flow sensor higher than that of room temperature and its detection system, which may provide reliable and direct experimental data to improve the micro heat pipe’s performance.The different distribution of temperature while liquid and gas flows the different structure of the thermal flow sensors with different heater has been simulated by ANSYS simulation software. And a kind of thermal micro flow sensor structures which is easy to explore the best detection points was designed after that. The micro flow sensor was fabricated using MEMS technical and the relationship between its performance and environment temperature has described by testing in different temperature environment conditions. The flow sensor detection system that can real-time display the gas flow rate within a certain range and draw the curve of flow rate versus time was developed based on MSP430 microcontroller and C# language. The internal temperature distribution were tested in practice, the heater’s impact of thermal micro flow sensors to the internal temperature field of micro heat pipes has been analyzed and the conclusion whether the thermal flow sensor could be used to detect the flow rate of micro heat pipes were gotten combining the thermal micro flow sensor designed in the paper with micro heat pipes. After that, the thermal flow sensor used to detect the vapor flow rate of micro heat pipes was optimized in structure and the internal flow rate of micro heat pipes were detected and analyzed.Studies showed that the structure of the thermal micro flow sensor designed in this paper could detect the micro gas flow rate under the environment higher than room temperature, and the measurement sensitivity could be improved by increasing the heater temperature or changing the position of measuring resistance pairs. And the thermal flow sensor optimized in structure could be used to detect the internal vapor flow rate of micro heat pipes actually and the detected results have important reference value, to some extent, to study micro heat pipes.