| RF MEMS switches due to its low insertion loss,low power consumption,small in size,ease of integration and other excellent properties has become the focus of research at home and abroad in recent years.This paper around K-band shunt capacitive MEMS switch’s design, had done the following research works:First of all, this paper detailed discusses the shunt capacitive MEMS switch’s basic theory, including mechanical and electrical analysis, to lay the foundation for the design of the switch.Secondly, the paper mainly study the factors which influence the MEMS switch’s performance, including the dielectric layer, the beam breadth, the switch beam structure which above the gap between the signal line and ground wire, and defect coplanar waveguide structure.This work had obtained some results which can provides useful guidance for design K-band MEMS switch. And then designed two K-band capacitive MEMS switch which is based on defect coplanar waveguide structure.Simulation shows that one of the MEMS switch’s resonant frequency is18.9GHz,the isolation is55.3dB at18.9GHz, the insertion loss is0.17dB at18.9GHz; Another MEMS switch’s resonant frequency is20.2GHz,the isolation is58.1dB at20.2GHz,the insertion loss is0.20dB at20.2GHz.Then, this article also discusses the processing technology of capacitive MEMS switch, and presents a process sequence graph of the capacitive MEMS switch, and points out some problems need to be aware of in layout design.In addition the MEMS switch packaging technologies is also introduced.At last, this paper discuss the factors which influence CPW fed reconfigurable antenna’ resonant frequency and bandwidth, and obtained some laws which can provide beneficial guidance to design K-band CPW fed antenna. And then this article design a K band reconfigurable antenna which base on K-band capacitive MEMS switch. The simulation results show that the antenna resonant frequency is21.4GHz, the bandwidth is10.4GHz, pattern reconfigurable Angle is11.8°... |
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