Graphene Microwave Nano-electromechanical Resonators

Microwave nano-mechanical resonator has a broad application prospect in high quality factors microwave devices, high sensitivity sensor, single molecule detector and macroscopic quantum effect detection and other fields. Graphene has nanoscale physical size, two-dimensional plane physical structure, excellent mechanical properties and electric properties, therefore Graphene nano-mechanical resonator has the incomparable advantage compared with other materials in fabrication,and activation and readout method. Graphene is NEMS study of Popular material. However, due to device structure is imperfect and fabrication is not mature enough, Graphene nano-mechanical resonators’ maximum operating frequency is still below 200 MHz.In this paper, we study physical mechanism and characteristics of nano-mechanical resonator, influence of various physical parameters on the resonant frequency of the resonator, to realize the microwave band of graphene NEMS resonators has some significance. Based on the characteristics of high frequency graphene top-gate structure FET to analysis Graphene nano-mechanical resonator. To facilitate the design and optimization of the device, we use the equivalent circuit method to research the relationship between FET model and mechanical vibration model of resonator. A novel direct RF measurement method based on graphene nano-mechanical resonator is proposed by studying the microwave semiconductor device characterization. A new structure of microwave nano-mechanical resonator is proposed based on grapheme/graphene oxide, and a vacuum test systems is established to achieve full electrical microwave signal activation and readout method. The results of this paper on guidance the fabrication and to accelerate application microwave nano-mechanical resonators in NEMS has the great significance.